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驱动电流密度对低压容性射频鞘电势及离子动能的影响
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驱动电流密度对低压容性射频鞘电势及离子动能的影响
Effect of Driving Current Density on Low-Pressure Capacitive Radio Frequency Plasma Sheath Potential Difference and Ion Kinetic Energy
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更新时间:2024/11/9 4:53:36