| 释义 |
BPSG
基本例句
硼磷硅玻璃¹⁰⁰
FSG production process is similar asBPSGprocess, and it only In-situ doping F, when product SiO2 layer.FSG薄膜其成长方式就像硼磷硅酸玻璃的制程一样，只不过是在成长SiO2的同时，内部掺入含有氟的物质。
Thus, experimented with B and P ratio of ILD materialBPSG,BPSGreflow conditions and combined poly gate CD to find the root cause and the method to solve the problem.针对接触窗桥接这种失效模式，通过实验改变内层介电材料硼磷硅玻璃中的硼磷比例，回火条件和多晶硅栅极的关键尺寸等相关工艺，再现了晶圆失效的模式，并找到了改善和消除失效的方式。
Deposition of CVDBPSGFilms and Its Reflow MechanismCVDBPSG膜的沉积及其回流机理 |