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不同厚度四面体非晶碳薄膜的拉曼表征和内应力
释义
不同厚度四面体非晶碳薄膜的拉曼表征和内应力
Raman characteristics and intrinsic stress of tetrahedral amorphous carbon films with different film thicknesses
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更新时间：2025/4/15 14:45:28