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词汇 Si-based sensor
释义 Si-based sensor
基本例句
硅基传感器
The characteristics and requests of micromachining for silicon based sensors are introduced.The conventional methods of si substrate microfabrication are briefly described.叙述了硅基传感器微机械加工的特点和要求,简要说明了硅衬底微细加工的常用方法。
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