recursion formula短语¹⁴⁴⁹⁷²⁺² 基本例句 递推公式 A temporary boundary condition is built to calculate the relative non-flatness of wafer chuck line by line and eliminate the effect of the wafer surface shape with recursion formula. 通过建立临时边界条件，以递推法消除晶圆面形影响，并逐行计算出承片台的相对不平度； cnoptics