optical part短语¹⁸⁰⁰⁹⁸⁺¹ 基本例句 光学零件 The optical part can be done by applying Electron Beam LithographyEBL, Inductively Coupled PlasmaICP etching, and Plasma- enhanced Chemical Vapor DepositionPECVD. 利用电子束光刻、等离子体增强化学气相沉积、感应耦合等离子体刻蚀来实现跑道型微环谐振器的制备; lunwenwa