| 释义 |
MOEMS
基本例句
微光机电系统¹⁰⁰
Study of optical path and collimating technique ofMOEMSoptical switch array with slope electrode;.引用该论文 明安杰;梁静秋;兰卫华;王维彪;董玮;陈维友.
The micromirror arrays usingMOEMSfabrication process are reviewed.综述利用微加工技术制作微型反射镜阵列；
An interferometricMOEMSgyroscope was presented which has spatial helical optical structure composed of micromirrors.提出一种基于微镜构成的空间螺旋光路的干涉式MOEMS陀螺,并对其进行了原理验证实验研究。
micro optical-electro-mechanical systern微型光机电系统MOEMS |