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单词 micro-electromechanical
释义 micro-electromechanicalCOCA³¹⁵¹¹¹⁺Economist⁴¹³⁰³⁺²
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The performance of MEMS Micro-Electromechanical System device is largely related to dimension.
MEMS器件的性能与尺寸密切相关。 chinaelectrondevices

The micro-electromechanical system MEMS technology is adopted to fabricate the substrate-free bi- material micro- cantilever arrays.
采用微细加工技术制作出无基底的双材料微悬臂梁阵列结构。 opticsjournal
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