micro-electromechanicalCOCA³¹⁵¹¹¹⁺⁴Economist⁴¹³⁰³⁺² 基本例句 🌏微机电 The performance of MEMS Micro-Electromechanical System device is largely related to dimension. MEMS器件的性能与尺寸密切相关。 chinaelectrondevices The micro-electromechanical system MEMS technology is adopted to fabricate the substrate-free bi- material micro- cantilever arrays. 采用微细加工技术制作出无基底的双材料微悬臂梁阵列结构。 opticsjournal