microelectromechanicalCOCA¹⁰¹⁴⁶⁵iWeb⁵⁹⁰⁴² 基本例句 🌏微机电技术；微电机 An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. 本书介绍的微机电系统和微系统的工程设计方法涉及电气和机械两方面技术。 sciencenet