释义 |
mechanical polishing短语¹⁴⁴⁹⁷²⁺² 基本例句 机械抛光 Further, since such mechanical polishing is possible, the productivity can be increased by adopting sheet treatment. 此外,因为可以进行这样的进行抛光,通过采用片处理,可提高产率。 dianzi518 We have to face some Cu line issues after we use Cu to replace AL, such as the reliability with Cu and low K dielectric, and post-CMP Chemical Mechanical Polishing Cu line voids defect. 在引入电镀铜工艺的同时我们也不得不面对一些铜线工艺所特有的缺陷,如铜线和低 K值介电质可靠性问题,以及电镀铜后产生的孔洞缺陷等问题。 boshuo |