释义 |
magnetron sputtering短语¹¹⁴⁴⁶⁷⁺⁴ 基本例句 磁控管溅射,磁控溅射 The film prepared by RF magnetron sputtering at200W, 2h is smooth, densified and has good adherence. The Ni- P alloy interlayer can effectively improve adherence between film and substrate. 用射频方式,功率为200W,时间为2小时制备的薄膜表面光滑致密,结合力良好,磷合金中间层的加入能有效增加结合强度; cnki Further more, the increase of B reduced greatly the touching off and keeping discharge voltages during magnetron sputtering coating, which gives another approach to lower voltage magnetron sputtering. 此外, B的增加显著降低了磁控溅射镀膜工艺的着火电压和维持放电电压,为实现低电压磁控溅射提供了另外一种思路。 cnki |