| 释义 |
lvdtsCOCA³¹⁵¹¹¹⁺⁴
基本例句
🌏位移；传感器；线性位移传感器
The local heights of wafer surface are measured by the linear variable differential transformer LVDTs when the different offsets between wafer and wafer chuck exist.
在晶圆与承片台存在不同偏移量时，利用线性差分传感器在线测量晶圆上不同点的局部高度； cnoptics
It is used in conjunction with LVDTs to convert transducer mechanical position to a unipolar or bipolar dc voltage with a high degree of accuracy and repeatability.
该系统配用 LVDT，将传感器探测到的机械位置信号转化为单极或双极直流电压，转化准确度高，重复性好。 bmjyw |