EUVCOCA¹³⁶³⁸³BNC²³⁶²¹³⁺¹ 基本例句 n.超紫外辐射¹⁰⁰ There are mainly two kinds of applications for EUV multilayer coating elements— EUV lithography and EUV astrophysics, each of them has different requirements on multilayer coatings. 多层膜光学元件主要应用于极紫外光刻与极紫外天文观测,两种系统对多层膜的要求各有侧重。 www.chineseoptics.net.cn