Electro-mechanicalCOCA¹⁷⁰⁰¹⁷BNC⁶⁵¹²⁴ 基本例句 机电¹⁰⁰ Therefore, the effect of the air squeeze film damping is an important factor in the design and fabrication of micro- electro-mechanical systems MEMS. 因此，对于微机电系统 MEMS器件的设计和制作，空气阻尼效应是影响其性能和工作条件的重要因素。 cnki