ebl英'ebl美'eblBNC²³⁶²¹³⁺¹ 基本例句 电子束蚀刻¹⁰⁰ Process of Si quantum wire based on EBL and RIE and process of nano- structure metal gate based on EBL, electron beam evaporation and lift-off techniques are reported in this paper. 介绍了用电子束光刻、反应离子刻蚀方法制备硅量子线和用电子束光刻、电子束蒸发以及剥离技术制备纳米金属栅的工艺方法; cnki