duvCOCA²⁸⁰¹³⁶⁺⁵ 基本例句 =damaging ultraviolet 紫外线损伤 Coherent light sources in the deep and vacuum UV DUV and VUV spectral regions become more important with the development of photolithography, laser micro- machining as well as laser spectroscopy. 随着光刻、激光微加工以及激光光谱仪的发展,紫外与深紫外光谱区的相干光源变得越来越重要。 cnki