| 释义 |
Cu interconnect
基本例句
铜互连
Keywords Cu interconnect;Microstructure;Stress;Electromigration;关键词铜互连线;微观结构;应力;电徙动;
In this thesis, we focuse on the microstructure and stress of ULSI Cu interconnects with their impacts on MTF of the electromigration.本论文主要研究了ULSI中铜互连线的微观结构和应力及其对与电徙动MTF的影响。
In this paper, the Damascene Cu interconnecting integration technology, low-k dielectric materials and barrier materials in Cu interconnecting integration technology are introduced.论述了铜互连技术中低k介质材料、势垒层材料以及铜互连布线的大马士革工艺.
Research and Development of the Cu Interconnect and Its Electromigration Failure铜互连电迁移失效的研究与进展 |